SURFACE-LAYER COMPOSITION CHANGES IN SPUTTERED ALLOYS AND COMPOUNDS

被引：123

作者：

LIAU, ZL

BROWN, WL

HOMER, R

POATE, JM

机构：

[1] CALTECH,PASADENA,CA 91125

[2] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

APPLIED PHYSICS LETTERS | 1977年 / 30卷 / 12期

关键词：

D O I：

10.1063/1.89285

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：626 / 628

页数：3

共 18 条

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