PRINCIPLES AND APPLICATIONS OF ION-BEAM TECHNIQUES FOR ANALYSIS OF SOLIDS AND THIN-FILMS

被引：312

作者：

CHU, WK

MAYER, JW

NICOLET, MA

BUCK, TM

AMSEL, G

EISEN, F

机构：

[1] CALTECH,PASADENA,CA 91109

[2] BELL TEL LABS INC,MURRAY HILL,NJ 07974

[3] ECOLE NORM SUPER,GRP PHYS SOLIDES,TOUR 23,11 QUAI ST BERNARD,75005 PRIS,FRANCE

[4] ROCKWELL INT,SCI CTR,THOUSAND OAKS,CA 91360

来源：

THIN SOLID FILMS | 1973年 / 17卷 / 01期

关键词：

D O I：

10.1016/0040-6090(73)90002-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：1 / 41

页数：41

共 125 条

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[10]

AMSEL G, 1972, PHYSICS ELECTROLYTES, V1, pCH4

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