PRINCIPLES AND APPLICATIONS OF ION-BEAM TECHNIQUES FOR ANALYSIS OF SOLIDS AND THIN-FILMS

被引：312

作者：

CHU, WK

MAYER, JW

NICOLET, MA

BUCK, TM

AMSEL, G

EISEN, F

机构：

[1] CALTECH,PASADENA,CA 91109

[2] BELL TEL LABS INC,MURRAY HILL,NJ 07974

[3] ECOLE NORM SUPER,GRP PHYS SOLIDES,TOUR 23,11 QUAI ST BERNARD,75005 PRIS,FRANCE

[4] ROCKWELL INT,SCI CTR,THOUSAND OAKS,CA 91360

来源：

THIN SOLID FILMS | 1973年 / 17卷 / 01期

关键词：

D O I：

10.1016/0040-6090(73)90002-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：1 / 41

页数：41

共 125 条

[21]

BOWER RW, 1973, THESIS CALIFORNIA I

[22] DENSITIES OF AMORPHOUS SI FILMS BY NUCLEAR BACKSCATTERING [J].

BRODSKY, MH ;

KAPLAN, D ;

ZIEGLER, JF .

APPLIED PHYSICS LETTERS, 1972, 21 (07) :305-&

[23] ION SCATTERING - SPECTROSCOPIC TOOL FOR STUDY OF OUTERMOST ATOMIC LAYER OF A SOLID SURFACE [J].

BRONGERSMA, HH ;

MUL, PM .

CHEMICAL PHYSICS LETTERS, 1972, 14 (03) :380-+

[24]

BROWN F, TO BE PUBLISHED

[25]

BUCK T, UNPUBLISHED

[26] RUTHERFORD SCATTERING STUDY OF DIFFUSION OF HEAVY-METAL IMPURITIES IN SILICON TO ION-DAMAGED SURFACE-LAYERS [J].

BUCK, TM ;

POATE, JM ;

PICKAR, KA ;

HSIEH, CM .

SURFACE SCIENCE, 1973, 35 (01) :362-379

[27] CHARGE STATES OF 25-150 KEV H AND HE-4 BACKSCATTERED FROM SOLID SURFACES [J].

BUCK, TM ;

WHEATLEY, GH ;

FELDMAN, LC .

SURFACE SCIENCE, 1973, 35 (01) :345-361

[28] STUDIES OF SOLID SURFACES WITH 100 KEV 4HE+ AND H+ ION-BEAMS [J].

BUCK, TM ;

WHEATLEY, GH .

SURFACE SCIENCE, 1972, 33 (01) :35-&

[29] GETTERING RATES OF VARIOUS FAST-DIFFUSING METAL IMPURITIES AT ION-DAMAGED LAYERS ON SILICON [J].

BUCK, TM ;

HSIEH, CM ;

POATE, JM ;

PICKAR, KA .

APPLIED PHYSICS LETTERS, 1972, 21 (10) :485-&

[30]

BUCK TM, 1970, NBS337 SPEC PUBL NOV

← 1 2 3 4 5 6 7 8 9 10 →