RUTHERFORD SCATTERING STUDY OF DIFFUSION OF HEAVY-METAL IMPURITIES IN SILICON TO ION-DAMAGED SURFACE-LAYERS

被引：44

作者：

BUCK, TM ^{[1
]}

POATE, JM ^{[1
]}

PICKAR, KA ^{[1
]}

HSIEH, CM ^{[1
]}

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

SURFACE SCIENCE | 1973年 / 35卷 / 01期

关键词：

D O I：

10.1016/0039-6028(73)90225-2

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

收藏

页码：362 / 379

页数：18

相关论文

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