SPUTTERING IN SURFACE ANALYSIS OF SOLIDS - DISCUSSION OF SOME PROBLEMS

被引：135

作者：

COBURN, JW ^{[1
]}

机构：

[1] IBM CORP,RES LAB,SAN JOSE,CA 95193

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1976年 / 13卷 / 05期

关键词：

D O I：

10.1116/1.569056

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1037 / 1044

页数：8

共 94 条

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