UNIFIED SPUTTERING THEORY

被引:45
作者
BRANDT, W
LAUBERT, R
机构
来源
NUCLEAR INSTRUMENTS & METHODS | 1967年 / 47卷 / 02期
关键词
D O I
10.1016/0029-554X(67)90431-4
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:201 / &
相关论文
共 19 条
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