A NUMERICAL-MODEL OF THE FLOW AND HEAT-TRANSFER IN A ROTATING-DISK CHEMICAL VAPOR-DEPOSITION REACTOR

被引：101

作者：

EVANS, G ^{[1
]}

GREIF, R ^{[1
]}

机构：

[1] UNIV CALIF BERKELEY, DEPT MECH ENGN, BERKELEY, CA 94720 USA

来源：

JOURNAL OF HEAT TRANSFER-TRANSACTIONS OF THE ASME | 1987年 / 109卷 / 04期

关键词：

D O I：

10.1115/1.3248205

中图分类号：

O414.1 [热力学];

学科分类号：

摘要：

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页码：928 / 935

页数：8

相关论文

共 15 条

[1] A MATHEMATICAL-MODEL OF THE COUPLED FLUID-MECHANICS AND CHEMICAL-KINETICS IN A CHEMICAL VAPOR-DEPOSITION REACTOR
COLTRIN, ME
KEE, RJ
MILLER, JA
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (02) : 425 - 434
[2] GAS-FLOW PATTERNS IN HORIZONTAL EXPITAXIAL REACTOR CELLS OBSERVED BY INTERFERENCE HOLOGRAPHY
GILING, LJ
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1982, 129 (03) : 634 - 644
[3] GOSMAN AD, 1973, LECTURE NOTES IMPERI
[4] HETEROGENEOUS KINETICS AND MASS-TRANSFER IN CHEMICAL VAPOR-DEPOSITION PROCESSES .3. THE ROTATING-DISK REACTOR
HITCHMAN, ML
CURTIS, BJ
[J]. JOURNAL OF CRYSTAL GROWTH, 1982, 60 (01) : 43 - 56
[5] CVD IN STAGNATION POINT FLOW - AN EVALUATION OF THE CLASSICAL 1D-TREATMENT
HOUTMAN, C
GRAVES, DB
JENSEN, KF
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (05) : 961 - 970
[6] KAPUR D, 1985, NOV AICHE ANN M CHIC
[7] HEAT TRANSFER BY LAMINAR FLOW FROM A ROTATING PLATE
MILLSAPS, K
POHLHAUSEN, K
[J]. JOURNAL OF THE AERONAUTICAL SCIENCES, 1952, 19 (02): : 120 - 126
[8] Paolucci S., 1982, 828257 SAND SAND NAT
[9] Patankar S., 1980, NUMERICAL HEAT TRANS
[10] SILICON DEPOSITION ON A ROTATING-DISK
POLLARD, R
NEWMAN, J
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1980, 127 (03) : 744 - 752