THE EFFECT OF DEBRIS FORMATION ON THE MORPHOLOGY OF EXCIMER LASER ABLATED POLYMERS

被引：48

作者：

TAYLOR, RS ^{[1
]}

LEOPOLD, KE ^{[1
]}

SINGLETON, DL ^{[1
]}

PARASKEVOPOULOS, G ^{[1
]}

IRWIN, RS ^{[1
]}

机构：

[1] NATL RES COUNCIL CANADA,DIV CHEM,OTTAWA K1A 0R9,ONTARIO,CANADA

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 05期

关键词：

D O I：

10.1063/1.341590

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：2815 / 2818

页数：4

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