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ULTRAVIOLET-LASER ABLATION OF POLYIMIDE FILMS
被引:222
作者
:
SRINIVASAN, R
论文数:
0
引用数:
0
h-index:
0
SRINIVASAN, R
BRAREN, B
论文数:
0
引用数:
0
h-index:
0
BRAREN, B
DREYFUS, RW
论文数:
0
引用数:
0
h-index:
0
DREYFUS, RW
机构
:
来源
:
JOURNAL OF APPLIED PHYSICS
|
1987年
/ 61卷
/ 01期
关键词
:
D O I
:
10.1063/1.338834
中图分类号
:
O59 [应用物理学];
学科分类号
:
摘要
:
引用
收藏
页码:372 / 376
页数:5
相关论文
共 19 条
[1]
EXCIMER LASER ETCHING OF POLYIMIDE
BRANNON, JH
论文数:
0
引用数:
0
h-index:
0
BRANNON, JH
LANKARD, JR
论文数:
0
引用数:
0
h-index:
0
LANKARD, JR
BAISE, AI
论文数:
0
引用数:
0
h-index:
0
BAISE, AI
BURNS, F
论文数:
0
引用数:
0
h-index:
0
BURNS, F
KAUFMAN, J
论文数:
0
引用数:
0
h-index:
0
KAUFMAN, J
[J].
JOURNAL OF APPLIED PHYSICS,
1985,
58
(05)
: 2036
-
2043
[2]
DREYFUS R, UNPUB
[3]
EXCIMER LASER ABLATION AND THERMAL COUPLING EFFICIENCY TO POLYMER-FILMS
DYER, PE
论文数:
0
引用数:
0
h-index:
0
机构:
Univ of Hull, Dep of Applied, Physics, Hull, Engl, Univ of Hull, Dep of Applied Physics, Hull, Engl
DYER, PE
SIDHU, J
论文数:
0
引用数:
0
h-index:
0
机构:
Univ of Hull, Dep of Applied, Physics, Hull, Engl, Univ of Hull, Dep of Applied Physics, Hull, Engl
SIDHU, J
[J].
JOURNAL OF APPLIED PHYSICS,
1985,
57
(04)
: 1420
-
1422
[4]
NANOSECOND PHOTOACOUSTIC STUDIES ON ULTRAVIOLET-LASER ABLATION OF ORGANIC POLYMERS
DYER, PE
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
DYER, PE
SRINIVASAN, R
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
SRINIVASAN, R
[J].
APPLIED PHYSICS LETTERS,
1986,
48
(06)
: 445
-
447
[5]
CALORIMETRIC AND ACOUSTIC STUDY OF ULTRAVIOLET-LASER ABLATION OF POLYMERS
GORODETSKY, G
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,POB 218,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,POB 218,YORKTOWN HTS,NY 10598
GORODETSKY, G
KAZYAKA, TG
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,POB 218,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,POB 218,YORKTOWN HTS,NY 10598
KAZYAKA, TG
MELCHER, RL
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,POB 218,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,POB 218,YORKTOWN HTS,NY 10598
MELCHER, RL
SRINIVASAN, R
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,POB 218,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,POB 218,YORKTOWN HTS,NY 10598
SRINIVASAN, R
[J].
APPLIED PHYSICS LETTERS,
1985,
46
(09)
: 828
-
830
[6]
SPECTROSCOPIC STUDIES OF POLY[N,N'-BIS(PHENOXYPHENYL)PYROMELLITIMIDE] .1. STRUCTURES OF THE POLYIMIDE AND 3 MODEL COMPOUNDS
ISHIDA, H
论文数:
0
引用数:
0
h-index:
0
机构:
CASE WESTERN RESERVE UNIV,DEPT MACROMOLEC SCI,CLEVELAND,OH 44106
CASE WESTERN RESERVE UNIV,DEPT MACROMOLEC SCI,CLEVELAND,OH 44106
ISHIDA, H
WELLINGHOFF, ST
论文数:
0
引用数:
0
h-index:
0
机构:
CASE WESTERN RESERVE UNIV,DEPT MACROMOLEC SCI,CLEVELAND,OH 44106
CASE WESTERN RESERVE UNIV,DEPT MACROMOLEC SCI,CLEVELAND,OH 44106
WELLINGHOFF, ST
BAER, E
论文数:
0
引用数:
0
h-index:
0
机构:
CASE WESTERN RESERVE UNIV,DEPT MACROMOLEC SCI,CLEVELAND,OH 44106
CASE WESTERN RESERVE UNIV,DEPT MACROMOLEC SCI,CLEVELAND,OH 44106
BAER, E
KOENIG, JL
论文数:
0
引用数:
0
h-index:
0
机构:
CASE WESTERN RESERVE UNIV,DEPT MACROMOLEC SCI,CLEVELAND,OH 44106
CASE WESTERN RESERVE UNIV,DEPT MACROMOLEC SCI,CLEVELAND,OH 44106
KOENIG, JL
[J].
MACROMOLECULES,
1980,
13
(04)
: 826
-
834
[7]
HCN EVOLUTION FROM THERMAL AND OXIDATIVE-DEGRADATION OF POLY(DIPHENYL METHANE PYROMELLITIMIDE) AT HIGH-TEMPERATURES
JELLINEK, HHG
论文数:
0
引用数:
0
h-index:
0
JELLINEK, HHG
DUNKLE, SR
论文数:
0
引用数:
0
h-index:
0
DUNKLE, SR
[J].
JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY,
1983,
21
(07)
: 2111
-
2131
[8]
EMISSION-SPECTRA, SURFACE QUALITY, AND MECHANISM OF EXCIMER LASER ETCHING OF POLYIMIDE FILMS
KOREN, G
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
KOREN, G
YEH, JTC
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
YEH, JTC
[J].
APPLIED PHYSICS LETTERS,
1984,
44
(12)
: 1112
-
1114
[9]
KOREN G, 1984, J APPL PHYS, V56, P2121
[10]
CONTROLLED MODIFICATION OF ORGANIC POLYMER SURFACES BY CONTINUOUS WAVE FAR-ULTRAVIOLET (185NM) AND PULSED-LASER (193NM) RADIATION - XPS STUDIES
LAZARE, S
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
LAZARE, S
HOH, PD
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
HOH, PD
BAKER, JM
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
BAKER, JM
SRINIVASAN, R
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
SRINIVASAN, R
[J].
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY,
1984,
106
(15)
: 4288
-
4290
←
1
2
→
共 19 条
[1]
EXCIMER LASER ETCHING OF POLYIMIDE
BRANNON, JH
论文数:
0
引用数:
0
h-index:
0
BRANNON, JH
LANKARD, JR
论文数:
0
引用数:
0
h-index:
0
LANKARD, JR
BAISE, AI
论文数:
0
引用数:
0
h-index:
0
BAISE, AI
BURNS, F
论文数:
0
引用数:
0
h-index:
0
BURNS, F
KAUFMAN, J
论文数:
0
引用数:
0
h-index:
0
KAUFMAN, J
[J].
JOURNAL OF APPLIED PHYSICS,
1985,
58
(05)
: 2036
-
2043
[2]
DREYFUS R, UNPUB
[3]
EXCIMER LASER ABLATION AND THERMAL COUPLING EFFICIENCY TO POLYMER-FILMS
DYER, PE
论文数:
0
引用数:
0
h-index:
0
机构:
Univ of Hull, Dep of Applied, Physics, Hull, Engl, Univ of Hull, Dep of Applied Physics, Hull, Engl
DYER, PE
SIDHU, J
论文数:
0
引用数:
0
h-index:
0
机构:
Univ of Hull, Dep of Applied, Physics, Hull, Engl, Univ of Hull, Dep of Applied Physics, Hull, Engl
SIDHU, J
[J].
JOURNAL OF APPLIED PHYSICS,
1985,
57
(04)
: 1420
-
1422
[4]
NANOSECOND PHOTOACOUSTIC STUDIES ON ULTRAVIOLET-LASER ABLATION OF ORGANIC POLYMERS
DYER, PE
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
DYER, PE
SRINIVASAN, R
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
SRINIVASAN, R
[J].
APPLIED PHYSICS LETTERS,
1986,
48
(06)
: 445
-
447
[5]
CALORIMETRIC AND ACOUSTIC STUDY OF ULTRAVIOLET-LASER ABLATION OF POLYMERS
GORODETSKY, G
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,POB 218,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,POB 218,YORKTOWN HTS,NY 10598
GORODETSKY, G
KAZYAKA, TG
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,POB 218,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,POB 218,YORKTOWN HTS,NY 10598
KAZYAKA, TG
MELCHER, RL
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,POB 218,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,POB 218,YORKTOWN HTS,NY 10598
MELCHER, RL
SRINIVASAN, R
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,POB 218,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,POB 218,YORKTOWN HTS,NY 10598
SRINIVASAN, R
[J].
APPLIED PHYSICS LETTERS,
1985,
46
(09)
: 828
-
830
[6]
SPECTROSCOPIC STUDIES OF POLY[N,N'-BIS(PHENOXYPHENYL)PYROMELLITIMIDE] .1. STRUCTURES OF THE POLYIMIDE AND 3 MODEL COMPOUNDS
ISHIDA, H
论文数:
0
引用数:
0
h-index:
0
机构:
CASE WESTERN RESERVE UNIV,DEPT MACROMOLEC SCI,CLEVELAND,OH 44106
CASE WESTERN RESERVE UNIV,DEPT MACROMOLEC SCI,CLEVELAND,OH 44106
ISHIDA, H
WELLINGHOFF, ST
论文数:
0
引用数:
0
h-index:
0
机构:
CASE WESTERN RESERVE UNIV,DEPT MACROMOLEC SCI,CLEVELAND,OH 44106
CASE WESTERN RESERVE UNIV,DEPT MACROMOLEC SCI,CLEVELAND,OH 44106
WELLINGHOFF, ST
BAER, E
论文数:
0
引用数:
0
h-index:
0
机构:
CASE WESTERN RESERVE UNIV,DEPT MACROMOLEC SCI,CLEVELAND,OH 44106
CASE WESTERN RESERVE UNIV,DEPT MACROMOLEC SCI,CLEVELAND,OH 44106
BAER, E
KOENIG, JL
论文数:
0
引用数:
0
h-index:
0
机构:
CASE WESTERN RESERVE UNIV,DEPT MACROMOLEC SCI,CLEVELAND,OH 44106
CASE WESTERN RESERVE UNIV,DEPT MACROMOLEC SCI,CLEVELAND,OH 44106
KOENIG, JL
[J].
MACROMOLECULES,
1980,
13
(04)
: 826
-
834
[7]
HCN EVOLUTION FROM THERMAL AND OXIDATIVE-DEGRADATION OF POLY(DIPHENYL METHANE PYROMELLITIMIDE) AT HIGH-TEMPERATURES
JELLINEK, HHG
论文数:
0
引用数:
0
h-index:
0
JELLINEK, HHG
DUNKLE, SR
论文数:
0
引用数:
0
h-index:
0
DUNKLE, SR
[J].
JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY,
1983,
21
(07)
: 2111
-
2131
[8]
EMISSION-SPECTRA, SURFACE QUALITY, AND MECHANISM OF EXCIMER LASER ETCHING OF POLYIMIDE FILMS
KOREN, G
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
KOREN, G
YEH, JTC
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
YEH, JTC
[J].
APPLIED PHYSICS LETTERS,
1984,
44
(12)
: 1112
-
1114
[9]
KOREN G, 1984, J APPL PHYS, V56, P2121
[10]
CONTROLLED MODIFICATION OF ORGANIC POLYMER SURFACES BY CONTINUOUS WAVE FAR-ULTRAVIOLET (185NM) AND PULSED-LASER (193NM) RADIATION - XPS STUDIES
LAZARE, S
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
LAZARE, S
HOH, PD
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
HOH, PD
BAKER, JM
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
BAKER, JM
SRINIVASAN, R
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
SRINIVASAN, R
[J].
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY,
1984,
106
(15)
: 4288
-
4290
←
1
2
→