EMISSION-SPECTRA, SURFACE QUALITY, AND MECHANISM OF EXCIMER LASER ETCHING OF POLYIMIDE FILMS

被引：91

作者：

KOREN, G ^{[1
]}

YEH, JTC ^{[1
]}

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

来源：

APPLIED PHYSICS LETTERS | 1984年 / 44卷 / 12期

关键词：

D O I：

10.1063/1.94661

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1112 / 1114

页数：3

共 12 条

[1] DIRECT ETCHING OF POLYMERIC MATERIALS USING A XECL LASER [J].

ANDREW, JE ;

DYER, PE ;

FORSTER, D ;

KEY, PH .

APPLIED PHYSICS LETTERS, 1983, 43 (08) :717-719

[2] COLLISIONLESS MULTIPHOTON DISSOCIATION OF SF6 - STATISTICAL THERMODYNAMIC PROCESS [J].

BLACK, JG ;

YABLONOVITCH, E ;

BLOEMBERGEN, N ;

MUKAMEL, S .

PHYSICAL REVIEW LETTERS, 1977, 38 (20) :1131-1134

[3] EVOLUTION OF A CO2-LASER-PRODUCED CADMIUM PLASMA [J].

GREEN, JM ;

SILFVAST, WT ;

WOOD, OR .

JOURNAL OF APPLIED PHYSICS, 1977, 48 (07) :2753-2761

[4]

Herzberg G., 1979, MOL SPECTRA MOL STRU, VIV

[5] SPECTROSCOPIC STUDIES OF POLY[N,N'-BIS(PHENOXYPHENYL)PYROMELLITIMIDE] .1. STRUCTURES OF THE POLYIMIDE AND 3 MODEL COMPOUNDS [J].

ISHIDA, H ;

WELLINGHOFF, ST ;

BAER, E ;

KOENIG, JL .

MACROMOLECULES, 1980, 13 (04) :826-834

[6] TRANSIENT POPULATION-DISTRIBUTION OF SF6 GAS EXCITED BY A CO2-LASER [J].

KOREN, G ;

LEVIN, I .

JOURNAL OF APPLIED PHYSICS, 1981, 52 (08) :4915-4920

[7]

Pearse R. W. B., 1976, IDENTIFICATION MOL S

[8] ABLATIVE PHOTO-DECOMPOSITION - ACTION OF FAR ULTRAVIOLET (193-NM) LASER-RADIATION ON POLY(ETHYLENE-TEREPHTHALATE) FILMS [J].

SRINIVASAN, R ;

LEIGH, WJ .

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1982, 104 (24) :6784-6785

[9] KINETICS OF THE ABLATIVE PHOTO-DECOMPOSITION OF ORGANIC POLYMERS IN THE FAR ULTRAVIOLET (193 NM) [J].

SRINIVASAN, R .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (04) :923-926

[10] SELF-DEVELOPING PHOTOETCHING OF POLY(ETHYLENE-TEREPHTHALATE) FILMS BY FAR ULTRAVIOLET EXCIMER LASER-RADIATION [J].

SRINIVASAN, R ;

MAYNEBANTON, V .

APPLIED PHYSICS LETTERS, 1982, 41 (06) :576-578

← 1 2 →