SELF-DEVELOPING PHOTOETCHING OF POLY(ETHYLENE-TEREPHTHALATE) FILMS BY FAR ULTRAVIOLET EXCIMER LASER-RADIATION

被引：622

作者：

SRINIVASAN, R

MAYNEBANTON, V

机构：

来源：

APPLIED PHYSICS LETTERS | 1982年 / 41卷 / 06期

关键词：

D O I：

10.1063/1.93601

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：576 / 578

页数：3

相关论文

共 8 条

[1] PHOTOCHEMICAL DEGRADATION OF POLY(ETHYLENE TEREPHTHALATE) .4. SURFACE CHANGES
BLAIS, P
DAY, M
WILES, DM
[J]. JOURNAL OF APPLIED POLYMER SCIENCE, 1973, 17 (06) : 1895 - 1907
[2] PHOTOCHEMICAL DEGRADATION OF POLY(ETHYLENE TEREPHTHALATE) .2. EFFECT OF WAVELENGTH AND ENVIRONMENT ON DECOMPOSITION PROCESS
DAY, M
WILES, DM
[J]. JOURNAL OF APPLIED POLYMER SCIENCE, 1972, 16 (01) : 191 - &
[3] PHOTOCHEMICAL DEGRADATION OF POLY(ETHYLENE TEREPHTHALATE) .3. DETERMINATION OF DECOMPOSITION PRODUCTS AND REACTION-MECHANISM
DAY, M
WILES, DM
[J]. JOURNAL OF APPLIED POLYMER SCIENCE, 1972, 16 (01) : 203 - &
[4] DAY M, 1972, J APPL POLY SCI, V16, P189
[5] ULTRAFAST HIGH-RESOLUTION CONTACT LITHOGRAPHY WITH EXCIMER LASERS
JAIN, K
WILLSON, CG
LIN, BJ
[J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1982, 26 (02) : 151 - 159
[6] EFFECTIVE DEEP ULTRAVIOLET PHOTOETCHING OF POLY(METHYL METHACRYLATE BY AN EXCIMER LASER
KAWAMURA, Y
TOYODA, K
NAMBA, S
[J]. APPLIED PHYSICS LETTERS, 1982, 40 (05) : 374 - 375
[7] SRINIVASAN R, 1979, J AM CHEM SOC, V100, P6389
[8] VONSONNTAG C, 1979, ADV PHOTOCHEM, V10, P59