DIRECT ETCHING OF POLYMERIC MATERIALS USING A XECL LASER

被引：356

作者：

ANDREW, JE

DYER, PE

FORSTER, D

KEY, PH

机构：

来源：

APPLIED PHYSICS LETTERS | 1983年 / 43卷 / 08期

关键词：

D O I：

10.1063/1.94488

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：717 / 719

页数：3

共 7 条

[1] PHOTOCHEMICAL DEGRADATION OF POLY(ETHYLENE TEREPHTHALATE) .4. SURFACE CHANGES [J].

BLAIS, P ;

DAY, M ;

WILES, DM .

JOURNAL OF APPLIED POLYMER SCIENCE, 1973, 17 (06) :1895-1907

[2]

JAIN K, 1982, IEEE ELECTR DEVICE L, V3, P53

[3] EFFECTIVE DEEP ULTRAVIOLET PHOTOETCHING OF POLY(METHYL METHACRYLATE BY AN EXCIMER LASER [J].

KAWAMURA, Y ;

TOYODA, K ;

NAMBA, S .

APPLIED PHYSICS LETTERS, 1982, 40 (05) :374-375

[4]

Lenz R. W., 1967, ORGANIC CHEM SYNTHET

[5] PHOTOLYSIS OF POLY(ETHYLENE TEREPHTHALATE) [J].

MARCOTTE, FB ;

CAMPBELL, D ;

CLEAVELA.JA ;

TURNER, DT .

JOURNAL OF POLYMER SCIENCE PART A-1-POLYMER CHEMISTRY, 1967, 5 (3PA1) :481-+

[6] SELF-DEVELOPING PHOTOETCHING OF POLY(ETHYLENE-TEREPHTHALATE) FILMS BY FAR ULTRAVIOLET EXCIMER LASER-RADIATION [J].

SRINIVASAN, R ;

MAYNEBANTON, V .

APPLIED PHYSICS LETTERS, 1982, 41 (06) :576-578

[7] LASER MARKING OF THIN ORGANIC FILMS [J].

WROBEL, JJ ;

MARCHANT, AB ;

HOWE, DG .

APPLIED PHYSICS LETTERS, 1982, 40 (11) :928-930

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