CALORIMETRIC AND ACOUSTIC STUDY OF ULTRAVIOLET-LASER ABLATION OF POLYMERS

被引：119

作者：

GORODETSKY, G ^{[1
]}

KAZYAKA, TG ^{[1
]}

MELCHER, RL ^{[1
]}

SRINIVASAN, R ^{[1
]}

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,POB 218,YORKTOWN HTS,NY 10598

来源：

APPLIED PHYSICS LETTERS | 1985年 / 46卷 / 09期

关键词：

D O I：

10.1063/1.95898

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：828 / 830

页数：3

共 13 条

[1]

DIRECT ETCHING OF POLYMERIC MATERIALS USING A XECL LASER [J].

ANDREW, JE ;

DYER, PE ;

FORSTER, D ;

KEY, PH .

APPLIED PHYSICS LETTERS, 1983, 43 (08) :717-719

[2]

SELF-DEVELOPING UV PHOTORESIST USING EXCIMER LASER EXPOSURE [J].

DEUTSCH, TF ;

GEIS, MW .

JOURNAL OF APPLIED PHYSICS, 1983, 54 (12) :7201-7204

[3]

DYER PE, 1984, CLEO 1984 TECHNICAL

[4]

JELLINEK HHG, 1984, J PHYS CHEM-US, V88, P3048, DOI 10.1021/j150658a024

[5]

EMISSION-SPECTRA, SURFACE QUALITY, AND MECHANISM OF EXCIMER LASER ETCHING OF POLYIMIDE FILMS [J].

KOREN, G ;

YEH, JTC .

APPLIED PHYSICS LETTERS, 1984, 44 (12) :1112-1114

[6]

LANE RJ, UNPUB ARCH DERMATOLO

[7]

THEORETICAL-ANALYSIS OF PULSE TECHNIQUE FOR MEASURING THERMAL-DIFFUSIVITY UTILIZING A PYROELECTRIC DETECTOR [J].

LANG, SB .

FERROELECTRICS, 1976, 11 (1-2) :315-319

[8]

FAR-ULTRAVIOLET LASER ABLATION OF ATHEROSCLEROTIC LESIONS [J].

LINSKER, R ;

SRINIVASAN, R ;

WYNNE, JJ ;

ALONSO, DR .

LASERS IN SURGERY AND MEDICINE, 1984, 4 (02) :201-206

[9]

MELCHER RL, 1984, SPRINGER SERIES CHEM, V39, P418

[10]

SELF-DEVELOPING PHOTOETCHING OF POLY(ETHYLENE-TEREPHTHALATE) FILMS BY FAR ULTRAVIOLET EXCIMER LASER-RADIATION [J].

SRINIVASAN, R ;

MAYNEBANTON, V .

APPLIED PHYSICS LETTERS, 1982, 41 (06) :576-578

← 1 2 →