SYNTHETIC-HOLOGRAMS WRITTEN BY A LASER PATTERN GENERATOR

被引：31

作者：

KRACKHARDT, U

SCHWIDER, J

SCHRADER, M

STREIBL, N

机构：

来源：

OPTICAL ENGINEERING | 1993年 / 32卷 / 04期

关键词：

SYNTHETIC HOLOGRAMS; LASER PATTERN GENERATORS;

D O I：

10.1117/12.61207

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A new pattern generator, initially designed for ASIC fabrication, is employed for writing synthetic holograms and other micro-optical components. The specifications and limits of this machine are investigated. Test structures and synthetic holograms are shown. Arbitrary patterns with micrometer resolution, submicrometer positioning accuracy, large area patterns (up to 150 x 150 mm2 possible), and good quality microprofiles are demonstrated.

引用

页码：781 / 785

页数：5

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