COMPUTER-SIMULATION OF CAICISS OF ALAS(001)

Recent coaxial impact-collision ion scattering spectroscopy (CAICISS) experiments studying growth kinetics have indicated that 2 keV He ions can be backscattered through 180-degrees from deep - 56 angstrom - within the target without losing more than a few hundred eV above the kinematic energy loss for 180-degrees scattering. Using simple average stopping data it is difficult to satisfactorily explain how particles can penetrate this deep and come back retaining so much of their initial energy. We use the MARLOWE binary collision code to show that it is indeed possible for particles to be scattered from this deep in the solid and still have sufficient energy to appear in the surface peak.