ON THE REACTION-KINETICS IN A MERCURY PHOTOSENSITIZED CVD OF A-SI-H FILMS

被引：23

作者：

MATSUI, Y ^{[1
]}

YUUKI, A ^{[1
]}

MORITA, N ^{[1
]}

TACHIBANA, K ^{[1
]}

机构：

[1] KYOTO INST TECHNOL,DEPT ELECTR,SAKYO KU,KYOTO 606,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1987年 / 26卷 / 09期

关键词：

D O I：

10.1143/JJAP.26.1575

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1575 / 1581

页数：7

共 20 条

[1] RATE CONSTANTS FOR REACTIONS OF HYDROGEN-ATOMS WITH SOME SILANES AND GERMANES [J].

AUSTIN, ER ;

LAMPE, FW .

JOURNAL OF PHYSICAL CHEMISTRY, 1977, 81 (12) :1134-1138

[2] HYDROGEN-ATOM INITIATED DECOMPOSITION OF MONOSILANE [J].

AUSTIN, ER ;

LAMPE, FW .

JOURNAL OF PHYSICAL CHEMISTRY, 1976, 80 (26) :2811-2817

[3] ORBITALLY SELECTIVE CHEMICAL-REACTION IN HG-H2 VANDERWAALS COMPLEXES [J].

BRECKENRIDGE, WH ;

JOUVET, C ;

SOEP, B .

JOURNAL OF CHEMICAL PHYSICS, 1986, 84 (03) :1443-1450

[4] FLASH SPECTROSCOPY WITH MERCURY RESONANCE RADIATION .4. MEASUREMENT OF MERCURY HYDRIDE YIELDS WITH A NITRIC-OXIDE TITRATION [J].

CALLEAR, AB ;

WOOD, PM .

JOURNAL OF THE CHEMICAL SOCIETY-FARADAY TRANSACTIONS II, 1972, 68 (02) :302-&

[5] A MATHEMATICAL-MODEL OF THE COUPLED FLUID-MECHANICS AND CHEMICAL-KINETICS IN A CHEMICAL VAPOR-DEPOSITION REACTOR [J].

COLTRIN, ME ;

KEE, RJ ;

MILLER, JA .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (02) :425-434

[6] A MATHEMATICAL-MODEL OF SILICON CHEMICAL VAPOR-DEPOSITION - FURTHER REFINEMENTS AND THE EFFECTS OF THERMAL-DIFFUSION [J].

COLTRIN, ME ;

KEE, RJ ;

MILLER, JA .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (06) :1206-1213

[7] COHERENT ANTI-STOKES RAMAN-SPECTROSCOPY OF RADIOFREQUENCY DISCHARGE PLASMAS OF SILANE AND DISILANE [J].

HATA, N ;

MATSUDA, A ;

TANAKA, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1986, 25 (01) :108-113

[8]

Hirschfelder J. O., 1964, MOL THEORY GASES LIQ, V165

[9] RATE CONSTANTS FOR REACTION OF HYDROGEN AND DEUTERIUM ATOMS WITH SILANE [J].

MIHELCIC, D ;

SCHUBERT, V ;

SCHINDLER, RN ;

POTZINGER, P .

JOURNAL OF PHYSICAL CHEMISTRY, 1977, 81 (16) :1543-1545

[10] 3P1 MERCURY-PHOTOSENSITIZED DECOMPOSITION OF MONOSILANE [J].

NIKI, H ;

MAINS, GJ .

JOURNAL OF PHYSICAL CHEMISTRY, 1964, 68 (02) :304-&

← 1 2 →