COHERENT ANTI-STOKES RAMAN-SPECTROSCOPY OF RADIOFREQUENCY DISCHARGE PLASMAS OF SILANE AND DISILANE

[1] DETECTION OF NEUTRAL SPECIES IN SILANE PLASMA USING COHERENT ANTI-STOKES RAMAN-SPECTROSCOPY [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1983, 22 (01): : L1 - L3

[2] Hata N., 1983, Proceedings of the International Ion Engineering Congress. The 7th Symposium (1983 International) on Ion Sources and Ion Assisted Technology (ISIAT '83) and the 4th International Conference on Ion and Plasma Assisted Techniques (IPAT '83), P1457

[3] NEUTRAL RADICAL DETECTION IN SILANE GLOW-DISCHARGE PLASMA USING COHERENT ANTI-STOKES RAMAN-SPECTROSCOPY [J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1983, 59-6 (DEC) : 667 - 670

[4] AN OPTICAL-EMISSION STUDY OF THE GLOW-DISCHARGE DEPOSITION OF HYDROGENATED AMORPHOUS-SILICON FROM ARGON-SILANE MIXTURES [J]. JOURNAL OF APPLIED PHYSICS, 1983, 54 (05) : 2276 - 2280

[5] Kiefer W, 1982, NONLINEAR RAMAN SPEC, P241

[6] MEASUREMENT OF VIBRATIONAL POPULATIONS IN LOW-PRESSURE HYDROGEN PLASMA BY COHERENT ANTI-STOKES RAMAN-SCATTERING [J]. JOURNAL OF APPLIED PHYSICS, 1981, 52 (04) : 2687 - 2691

[7] DISSOCIATIVE EXCITATION OF SIH4, SID4, SI2H6 AND GEH4 BY 0-100 EV ELECTRON-IMPACT [J]. CHEMICAL PHYSICS, 1983, 80 (03) : 351 - 365

[8] DISSOCIATION CROSS-SECTIONS OF SILANE AND DISILANE BY ELECTRON-IMPACT [J]. CHEMICAL PHYSICS, 1982, 73 (03) : 383 - 394

[9] FUNDAMENTAL MECHANISMS IN SILANE PLASMA DECOMPOSITIONS AND AMORPHOUS-SILICON DEPOSITION [J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1983, 59-6 (DEC) : 649 - 657

[10] GLOW-DISCHARGE PREPARATION OF AMORPHOUS HYDROGENATED SILICON FROM HIGHER SILANES [J]. APPLIED PHYSICS LETTERS, 1980, 37 (08) : 725 - 727

[1] DETECTION OF NEUTRAL SPECIES IN SILANE PLASMA USING COHERENT ANTI-STOKES RAMAN-SPECTROSCOPY [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1983, 22 (01): : L1 - L3

[2] Hata N., 1983, Proceedings of the International Ion Engineering Congress. The 7th Symposium (1983 International) on Ion Sources and Ion Assisted Technology (ISIAT '83) and the 4th International Conference on Ion and Plasma Assisted Techniques (IPAT '83), P1457

[3] NEUTRAL RADICAL DETECTION IN SILANE GLOW-DISCHARGE PLASMA USING COHERENT ANTI-STOKES RAMAN-SPECTROSCOPY [J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1983, 59-6 (DEC) : 667 - 670

[4] AN OPTICAL-EMISSION STUDY OF THE GLOW-DISCHARGE DEPOSITION OF HYDROGENATED AMORPHOUS-SILICON FROM ARGON-SILANE MIXTURES [J]. JOURNAL OF APPLIED PHYSICS, 1983, 54 (05) : 2276 - 2280

[5] Kiefer W, 1982, NONLINEAR RAMAN SPEC, P241

[6] MEASUREMENT OF VIBRATIONAL POPULATIONS IN LOW-PRESSURE HYDROGEN PLASMA BY COHERENT ANTI-STOKES RAMAN-SCATTERING [J]. JOURNAL OF APPLIED PHYSICS, 1981, 52 (04) : 2687 - 2691

[7] DISSOCIATIVE EXCITATION OF SIH4, SID4, SI2H6 AND GEH4 BY 0-100 EV ELECTRON-IMPACT [J]. CHEMICAL PHYSICS, 1983, 80 (03) : 351 - 365

[8] DISSOCIATION CROSS-SECTIONS OF SILANE AND DISILANE BY ELECTRON-IMPACT [J]. CHEMICAL PHYSICS, 1982, 73 (03) : 383 - 394

[9] FUNDAMENTAL MECHANISMS IN SILANE PLASMA DECOMPOSITIONS AND AMORPHOUS-SILICON DEPOSITION [J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1983, 59-6 (DEC) : 649 - 657

[10] GLOW-DISCHARGE PREPARATION OF AMORPHOUS HYDROGENATED SILICON FROM HIGHER SILANES [J]. APPLIED PHYSICS LETTERS, 1980, 37 (08) : 725 - 727