GLOW-DISCHARGE PREPARATION OF AMORPHOUS HYDROGENATED SILICON FROM HIGHER SILANES

[1] VIBRATIONAL SPECTRUM OF DISILANE [J]. JOURNAL OF CHEMICAL PHYSICS, 1957, 26 (05) : 1107 - 1117

[2] BOWREY M, 1971, P R SOC A, V341

[3] BRODSKY MH, 1977, PHYS REV B, V16, P3556, DOI 10.1103/PhysRevB.16.3556

[4] STRUCTURAL, OPTICAL, AND ELECTRICAL PROPERTIES OF AMORPHOUS SILICON FILMS [J]. PHYSICAL REVIEW B, 1970, 1 (06): : 2632 - &

[5] BRODSKY MH, 1979, AMORPHOUS SEMICONDUC

[6] AMORPHOUS SILICON SOLAR-CELL [J]. APPLIED PHYSICS LETTERS, 1976, 28 (11) : 671 - 673

[7] ION-MOLECULE REACTIONS IN DISILANE [J]. JOURNAL OF PHYSICAL CHEMISTRY, 1974, 78 (12) : 1184 - 1189

[8] SYNTHESIS OF HIGHER SILANES AND GERMANES [J]. JOURNAL OF INORGANIC & NUCLEAR CHEMISTRY, 1965, 27 (09): : 1911 - &

[9] GROWTH-MORPHOLOGY AND DEFECTS IN PLASMA-DEPOSITED A-SI-H FILMS [J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1980, 35-6 (JAN-) : 159 - 170

[10] KNIGHTS JC, 1980, B AM PHYS SOC, V25, P294

[1] VIBRATIONAL SPECTRUM OF DISILANE [J]. JOURNAL OF CHEMICAL PHYSICS, 1957, 26 (05) : 1107 - 1117

[2] BOWREY M, 1971, P R SOC A, V341

[3] BRODSKY MH, 1977, PHYS REV B, V16, P3556, DOI 10.1103/PhysRevB.16.3556

[4] STRUCTURAL, OPTICAL, AND ELECTRICAL PROPERTIES OF AMORPHOUS SILICON FILMS [J]. PHYSICAL REVIEW B, 1970, 1 (06): : 2632 - &

[5] BRODSKY MH, 1979, AMORPHOUS SEMICONDUC

[6] AMORPHOUS SILICON SOLAR-CELL [J]. APPLIED PHYSICS LETTERS, 1976, 28 (11) : 671 - 673

[7] ION-MOLECULE REACTIONS IN DISILANE [J]. JOURNAL OF PHYSICAL CHEMISTRY, 1974, 78 (12) : 1184 - 1189

[8] SYNTHESIS OF HIGHER SILANES AND GERMANES [J]. JOURNAL OF INORGANIC & NUCLEAR CHEMISTRY, 1965, 27 (09): : 1911 - &

[9] GROWTH-MORPHOLOGY AND DEFECTS IN PLASMA-DEPOSITED A-SI-H FILMS [J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1980, 35-6 (JAN-) : 159 - 170

[10] KNIGHTS JC, 1980, B AM PHYS SOC, V25, P294