GROWTH-MORPHOLOGY AND DEFECTS IN PLASMA-DEPOSITED A-SI-H FILMS

被引：224

作者：

KNIGHTS, JC

机构：

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 1980年 / 35-6卷 / JAN-期

关键词：

D O I：

10.1016/0022-3093(80)90589-X

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：159 / 170

页数：12

共 32 条

[1] ELECTRON-MICROSCOPE STRUCTURE AND INTERNAL-STRESS IN THIN SILVER AND GOLD-FILMS DEPOSITED ONTO MGF2 AND SIO SUBSTRATES [J].

ABERMANN, R ;

KOCH, R ;

KRAMER, R .

THIN SOLID FILMS, 1979, 58 (02) :365-370

[2] HYDROGEN-ATOM INITIATED DECOMPOSITION OF MONOSILANE [J].

AUSTIN, ER ;

LAMPE, FW .

JOURNAL OF PHYSICAL CHEMISTRY, 1976, 80 (26) :2811-2817

[3] COMPARATIVE-STUDY OF STRUCTURE OF EVAPORATED AND GLOW-DISCHARGE SILICON [J].

BARNA, A ;

BARNA, PB ;

RADNOCZI, G ;

TOTH, L ;

THOMAS, P .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1977, 41 (01) :81-84

[4] COMPUTER-SIMULATION OF POST-NUCLEATION GROWTH OF THIN AMORPHOUS-GERMANIUM FILMS [J].

BARNA, A ;

BARNA, PB ;

RADNOCZI, G ;

SUGAWARA, H ;

THOMAS, P .

THIN SOLID FILMS, 1978, 48 (02) :163-174

[5] DEFECT CREATION AND HYDROGEN EVOLUTION IN AMORPHOUS SI-H [J].

BIEGELSEN, DK ;

STREET, RA ;

TSAI, CC ;

KNIGHTS, JC .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1980, 35-6 (JAN-) :285-290

[6] ANISOTROPIC MICROSTRUCTURE IN EVAPORATED AMORPHOUS GERMANIUM FILMS [J].

CARGILL, GS .

PHYSICAL REVIEW LETTERS, 1972, 28 (21) :1372-&

[7] COLUMNAR MICROSTRUCTURE IN VAPOR-DEPOSITED THIN-FILMS [J].

DIRKS, AG ;

LEAMY, HJ .

THIN SOLID FILMS, 1977, 47 (03) :219-233

[8]

FITE WL, 1969, ADV CHEM SER, V80, P1

[9]

FREEMAN LA, 1977, STRUCTURE NONCRYSTAL

[10]

Gabe D.R., 1973, METALL MATER TECHNOL, V5, P72

← 1 2 3 4 →