A SIMPLE APPARATUS FOR DC BIAS SPUTTERING

被引：3

作者：

BOMER, RP

BECK, AH

机构：

来源：

VACUUM | 1970年 / 20卷 / 07期

关键词：

D O I：

10.1016/S0042-207X(70)80361-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：285 / &

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[1] BECK AH, 1952, VACUUM, V2, P137
[2] PREPARATION + PROPERTIES OF THIN-FILM HARD SUPERCONDUCTORS
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[4] BIAS SPUTTERING - ITS TECHNIQUES AND APPLICATIONS
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[5] DEPOSITION OF NIOBIUM THIN FILMS BY DC DIODE AND SUBSTRATE BIAS SPUTTERING
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