RAPID THERMAL-PROCESSING OF PZT THIN-FILMS

被引：5

作者：

HUANG, Y

REANEY, IM

BELL, AJ

机构：

[1] Laboratoire de Ceramique, EPFL, 1015 Lausanne, MX-C Ecublens

来源：

FERROELECTRICS | 1992年 / 134卷 / 1-4期

关键词：

D O I：

10.1080/00150199208015601

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Thin films of Pb(Zr0.53Ti0.47)03 on Pt-coated Si substrates were prepared by sol-gel deposition. The dielectric properties and polarization reversal characteristics were measured as a function of sintering conditions using a rapid annealing technique. The results are interpreted with respect to the phase and microstructural development of the films. Their suitability for incorporation into semiconductor devices is discussed, with particular attention given to the possibility of low temperature processing.

引用

页码：285 / 290

页数：6

共 12 条

[1]

Budd K. D., 1985, British Ceramic Proceedings, P107

[2]

DEKLEVA TW, 1988, COMM AM CERAM SOC C, V280

[3] CRYSTALLIZATION OF AMORPHOUS LEAD-TITANATE PREPARED BY A SOL-GEL PROCESS [J].