MULTIELEMENT CHARACTERIZATION OF SILICON-NITRIDE POWDERS BY ATOMIC AND MASS-SPECTROMETRIC SOLUTION METHODS

被引：8

作者：

FRANEK, M

KRIVAN, V

GERCKEN, B

PAVEL, J

机构：

[1] UNIV ULM,SEKT ANALYT & HOCHSTREINIGUNG,D-89069 ULM,GERMANY

[2] CIBA GEIGY AG,DEPT CENT ANALYT,CH-4002 BASEL,SWITZERLAND

来源：

MIKROCHIMICA ACTA | 1994年 / 113卷 / 3-6期

关键词：

SILICON NITRIDE POWDER; DECOMPOSITION; TRACE CHARACTERIZATION; GFAAS; ICP-AES; ICP-MS;

D O I：

10.1007/BF01243615

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

A sample pretreatment technique for silicon nitride involving digestion and matrix/traces separation was developed by means of radiotracers and applied to analysis of this material by inductively coupled plasma atomic emission spectrometry, inductively coupled plasma mass spectrometry and graphite furnace atomic absorption spectrometry. The results obtained for a high purity silicon nitride material by these methods are compared each with the other and with those obtained by neutron activation analysis. The limits of detection and the capabilities of the methods are compared and discussed.

引用

页码：251 / 259

页数：9

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