SELECTIVE RESPUTTERING INDUCED ANISOTROPY IN AMORPHOUS FILMS

被引:64
作者
GAMBINO, RJ
CUOMO, JJ
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1978年 / 15卷 / 02期
关键词
D O I
10.1116/1.569574
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:296 / 301
页数:6
相关论文
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