共 28 条
- [2] CARGILL GS, 1976, 31 AIP C P, P339
- [3] CARGILL GS, UNPUBLISHED
- [5] CHAUDHARI P, 1976, 29 AIP C P, P113
- [6] Cronemeyer D., 1974, AIP CONF P, V18, P85
- [7] CUOMO JJ, 1977, J VAC SCI TECHNOL, V14, P152, DOI 10.1116/1.569109
- [8] INFLUENCE OF SPUTTERING PARAMETERS ON COMPOSITION OF MULTICOMPONENT FILMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (01): : 79 - 83
- [9] STEADY-STATE MASS BALANCE APPROACH TO SUBSTRATE BIASED RF SPUTTERING [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (04): : 965 - 968
- [10] ESHO S, 1976, 34 AIP C P, P331