A VACUUM ULTRAVIOLET SCANNING REFLECTOMETER DESIGNED TO MINIMIZE ALIGNMENT ERRORS

被引:1
作者
DRAPER, JC
MURPHY, E
机构
来源
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1970年 / 3卷 / 08期
关键词
D O I
10.1088/0022-3735/3/8/311
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
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页码:633 / &
相关论文
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