PROPERTIES OF REACTIVELY SPUTTERED TIN OXIDE-FILMS AS CO GAS SENSORS

被引：18

作者：

DIGIULIO, M ^{[1
]}

MICOCCI, G ^{[1
]}

RELLA, R ^{[1
]}

SICILIANO, P ^{[1
]}

TEPORE, A ^{[1
]}

机构：

[1] CNR,IST MAT ELETTRON,I-73100 LECCE,ITALY

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1995年 / 23卷 / 2-3期

关键词：

CARBON MONOXIDE SENSOR; TIN OXIDE;

D O I：

10.1016/0925-4005(94)01275-M

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

SnO2 thin films for CO sensor applications have been obtained by r.f. reactive sputtering from a target of the same compound in an Ar-O-2 atmosphere. The films are polycrystalline with mean grain sizes in the range 60-100 nm. An energy gap of about 4.14 eV is determined from the analysis of the spectral dependence of the absorption coefficient. The electrical measurements are carried out in a flowing gas system where dry air at ambient pressure is used as the carrier and reference gas. The CO sensitivity is found to be dependent on the sputtering conditions. The samples with relatively high initial resistance (>2 k Omega) are sensitive to CO injection. The film sensitivity is found to reach the highest values in the temperature range 500-600 K.

引用

页码：193 / 195

页数：3

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