RECOIL IMPLANTATION FROM A THICK-FILM SOURCE

被引：13

作者：

FISCHER, G

CARTER, G

WEBB, R

机构：

来源：

RADIATION EFFECTS AND DEFECTS IN SOLIDS | 1978年 / 38卷 / 1-2期

关键词：

D O I：

10.1080/00337577808233207

中图分类号：

TL [原子能技术]; O571 [原子核物理学];

学科分类号：

0827 ; 082701 ;

摘要：

引用

页码：41 / 43

页数：3

共 16 条

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CHRISTENSEN, O ;

BAY, HL .

APPLIED PHYSICS LETTERS, 1976, 28 (09) :491-494

[3] RECOIL IMPLANTATION OF MATERIALS [J].

COLLIGON, JS ;

FISCHER, G ;

PATEL, MH .

JOURNAL OF MATERIALS SCIENCE, 1977, 12 (04) :829-831

[4]

FISCHER G, 1977, 7TH INT C AT COLL SO

[5] RECOIL IMPLANTATION FROM A THIN SOURCE .1. UNDERLYING THEORY AND NUMERICAL RESULTS [J].

KELLY, R ;

SANDERS, JB .

SURFACE SCIENCE, 1976, 57 (01) :143-156

[6]

MOLINE RA, 1975, ATOMIC COLLISIONS SO, P159

[7] MIGRATION OF MO ATOMS ACROSS MO-SI INTERFACE INDUCED BY AR+ ION-BOMBARDMENT [J].

NISHI, H ;

SAKURAI, T ;

AKAMATSU, T ;

FURUYA, T .

APPLIED PHYSICS LETTERS, 1974, 25 (06) :337-339

[8]

NISHI H, 1957, ION IMPLANTATION SEM, P347

[9]

Shannon J. M., 1976, Applications of ion beams to materials 1975, P37

[10]

SIGMUND P, 1972, REV ROUM PHYS, V17, P1079

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