SILICON MICRO-TRANSDUCERS

被引：20

作者：

MIDDELHOEK, S

NOORLAG, DJW

机构：

[1] Dept. Elect. Engin., Delft Univ. Technol., Delft, Netherlands

来源：

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1981年 / 14卷 / 12期

关键词：

704 Electric Components and Equipment;

D O I：

10.1088/0022-3735/14/12/001

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

By means of silicon planar technology it is possible to make not only integrated circuits but also integrated sensors and actuators. This paper gives a comprehensive review of research work in the sensor area. It also includes some general considerations with respect to measurement systems and signal conversion as well as some conclusions and comments on a future outlook.

引用

页码：1343 / 1352

页数：10

共 65 条

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[2]

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[4]

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[5]

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[6]

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[10]

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