SILICON HYBRID WAFER-SCALE PACKAGE TECHNOLOGY

被引:16
作者
JOHNSON, RW
DAVIDSON, JL
JAEGER, RC
KERNS, DV
机构
关键词
D O I
10.1109/JSSC.1986.1052616
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
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页码:845 / 851
页数:7
相关论文
共 56 条
[51]   SILICON-ON-SILICON PACKAGING [J].
SPIELBERGER, RK ;
HUANG, CD ;
NUNNE, WH ;
MONES, AH ;
FETT, DL ;
HAMPTON, FL .
IEEE TRANSACTIONS ON COMPONENTS HYBRIDS AND MANUFACTURING TECHNOLOGY, 1984, 7 (02) :193-196
[52]   POLYIMIDE INSULATORS FOR MULTILEVEL INTERCONNECTIONS [J].
WILSON, AM .
THIN SOLID FILMS, 1981, 83 (02) :145-163
[53]  
WINKLER ER, 1985, SEMICONDUCT INT MAY, P350
[54]  
WINKLER ER, 1982, SOLID STATE TECH JUN, P94
[55]  
WOODRUFF B, 1984, ELECTRONICS 0308, P147
[56]  
1984, ELECTRON WEEK 1001, P47