NEW ELECTRON AND HOLE SPECTROSCOPIES BASED ON BALLISTIC ELECTRON-EMISSION MICROSCOPY

被引:31
作者
BELL, LD [1 ]
KAISER, WJ [1 ]
HECHT, MH [1 ]
DAVIS, LC [1 ]
机构
[1] FORD MOTOR CO,RES STAFF,DEARBORN,MI 48121
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1991年 / 9卷 / 02期
关键词
D O I
10.1116/1.585466
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Ballistic electron emission microscopy (BEEM) is shown to be one of a class of carrier transport nanospectroscopies which measure both elastic and inelastic transport of electrons and holes in thin film structures. In BEEM, electrons are injected into a metal film from a tunnel tip and are collected in the substrate after ballistic transport through the film. An analogous spectroscopy can be performed using hole transport into a p-type semiconductor substrate. In the present work, it is shown that inelastic scattering in metal films results in electron-hole pair creation which can be detected by similar techniques. A theory for this spectroscopy successfully explains the experimental results.
引用
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页码:594 / 600
页数:7
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