DSC OF AS-DEPOSITED THIN-FILMS DIP-COATED ON THE SUBSTRATE - THERMAL-CHANGE OF INDIUM (III) 2-ETHYLHEXANOATE TO FORM IN2O3 THIN-FILMS

被引：12

作者：

SAWADA, Y ^{[1
]}

OMIKA, K ^{[1
]}

ITO, Y ^{[1
]}

MUTA, F ^{[1
]}

MOMOTA, M ^{[1
]}

机构：

[1] RIGAKU CO, AKISHIMA, TOKYO 196, JAPAN

来源：

JOURNAL OF THERMAL ANALYSIS AND CALORIMETRY | 1993年 / 40卷 / 03期

关键词：

DIP-COATING; INDIUM OXIDE; THIN FILMS;

D O I：

10.1007/BF02546876

中图分类号：

O414.1 [热力学];

学科分类号：

摘要：

The formation process of a ceramic (indium oxide) thin film (thickness: approximately 20 nm to several microns) was investigated by thermal analyses. Thermal change of an organic precursor, indium(III) 2-ethylhexanoate, dip-coated on a glass substrate was successfully detected by DSC in air. Exothermic phenomena were observed at marked lower temperatures for the thin films than for the bulk material; thinner films bad slightly lower peak temperatures. The reaction mechanism is discussed with reference to mass spectra of the evolved gases.

引用

页码：1145 / 1150

页数：6