INDIUM TIN OXIDE THIN-FILMS PREPARED BY CHEMICAL VAPOR-DEPOSITION

被引：123

作者：

MARUYAMA, T

FUKUI, K

机构：

[1] Department of Chemical Engineering, Faculty of Engineering, Kyoto University, Sakyo-ku, Kyoto, 606, Yoshida-Honmachi

来源：

THIN SOLID FILMS | 1991年 / 203卷 / 02期

关键词：

D O I：

10.1016/0040-6090(91)90137-M

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Transparent conductive indium tin oxide thin films were prepared by an atmospheric pressure chemical vapour deposition method without using an oxygen donor. The raw materials were indium 2-ethylhexanoate and tin(IV) chloride, which are inexpensive and easy to handle. Polycrystalline films were obtained at a reaction temperature of 400-degrees-C. The tin content in the film is adjustable by changing the ratio of the flow rate of the carrier gas. For a 430 nm thick film deposited at 400-degrees-C, the resistivity was 2.9 x 10(-4)-OMEGA cm, and the transmittance was more than 80% in the wavenumber range above 550 nm. The effects of tin doping on the structure and characteristics of the film are discussed by comparing the results with the corresponding values for non-doped indium oxide film.

引用

页码：297 / 302

页数：6

共 6 条

[1]

Barret C., 1980, STRUCTURE METALS, P204

[2] CHEMICAL VAPOR-DEPOSITION OF TRANSPARENT ELECTRICALLY CONDUCTING LAYERS OF INDIUM OXIDE DOPED WITH TIN [J].

KANE, J ;

SCHWEIZER, HP ;

KERN, W .

THIN SOLID FILMS, 1975, 29 (01) :155-163

[3] FLUORINE-DOPED INDIUM OXIDE THIN-FILMS PREPARED BY CHEMICAL VAPOR-DEPOSITION [J].

MARUYAMA, T ;

FUKUI, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1990, 29 (09) :L1705-L1707

[4] INDIUM-TIN OXIDE THIN-FILMS PREPARED BY THERMAL-DECOMPOSITION OF METALLIC COMPLEX SALTS [J].

MARUYAMA, T ;

KOJIMA, A .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1988, 27 (10) :L1829-L1831

[5] INDIUM-TIN OXIDE THIN-FILMS PREPARED BY CHEMICAL VAPOR-DEPOSITION FROM METAL ACETATES [J].

MARUYAMA, T ;

TABATA, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1990, 29 (02) :L355-L357

[6] TRANSPARENT CONDUCTIVE FILMS OF IN2O3-SN PREPARED BY THE PYROLYSIS METHOD [J].

RYABOVA, LA ;

SALUN, VS ;

SERBINOV, IA .

THIN SOLID FILMS, 1982, 92 (04) :327-332

← 1 →