COMPOSITIONALLY DEPENDENT SI 2P BINDING-ENERGY SHIFTS IN SILICON OXYNITRIDE THIN-FILMS

被引:37
作者
BROW, RK [1 ]
PANTANO, CG [1 ]
机构
[1] PENN STATE UNIV,DEPT MAT SCI & ENGN,UNIVERSITY PK,PA 16801
关键词
D O I
10.1111/j.1151-2916.1986.tb04738.x
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:314 / 316
页数:3
相关论文
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