RF INDUCTION TECHNIQUE FOR SAMPLE HEATING IN SURFACE SCIENCE EXPERIMENTS

被引：19

作者：

WINTERS, HF

SCHLAEGEL, J

HORNE, D

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1978年 / 15卷 / 04期

关键词：

D O I：

10.1116/1.569818

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：1605 / 1608

页数：4

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