THE CHARACTERIZATION OF PLASMA POLYMERS BY XPS AND STATIC SIMS

X-ray photoelectron spectroscopy and static secondary ion mass spectrometry (s.i.m.s.) have been used to characterize plasma polymers of perfluorobenzene (PFB), perfluorotoluene (PFT), perfluorocyclohexene, perfluorocyclohexane and benzene. The plasma polymers of PFB and PFT appear to be based on a perfluoroalkylbenzene-type structure, with lesser amounts of other ring systems and very few aliphatic chains. The polymers derived from perfluorocyclohexene and perfluorocyclohexane were found to be much more aliphatic in nature, with fewer aromatic and other ring systems. The s.i.m.s. analysis of plasma-polymerized benzene was almost identical to that of polystyrene, but this probably does not reflect the true nature of the plasma polymer.