NEW METHOD FOR DETERMINING THIN-FILM REFRACTIVE-INDEX AND THICKNESS USING GUIDED OPTICAL WAVES

被引：54

作者：

WEI, JS

WESTWOOD, WD

机构：

来源：

APPLIED PHYSICS LETTERS | 1978年 / 32卷 / 12期

关键词：

D O I：

10.1063/1.89928

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：819 / 821

页数：3

相关论文

共 11 条

[1] BORN M, 1964, PRINCIPLES OPTICS, P49
[2] REFRACTIVE INDICES OF ZNO ZNS AND SEVERAL THIN-FILM INSULATORS
BURGIEL, JC
CHEN, YS
VRATNY, F
SMOLINSKY, G
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1968, 115 (07) : 729 - +
[3] PROPERTY CHANGES IN PYROLYTIC SILICON NITRIDE WITH REACTANT COMPOSITION CHANGES
DOO, VY
KERR, DR
NICHOLS, DR
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1968, 115 (01) : 61 - &
[4] METAL-CLAD OPTICAL-WAVEGUIDES - ANALYTICAL AND EXPERIMENTAL STUDY
KAMINOW, IP
MAMMEL, WL
WEBER, HP
[J]. APPLIED OPTICS, 1974, 13 (02): : 396 - 405
[5] SCHINKE DP, 1977, IEEE J QUANTUM ELECT, V13, pD4
[6] LIGHT WAVES IN THIN FILMS AND INTEGRATED OPTICS
TIEN, PK
[J]. APPLIED OPTICS, 1971, 10 (11): : 2395 - &
[7] INTEGRATED-OPTICS AND THIN-FILM TECHNOLOGY
TIEN, PK
[J]. PHYSICA B & C, 1977, 89 (APR): : 241 - 254
[8] INTEGRATED-OPTICS AND NEW WAVE PHENOMENA IN OPTICAL-WAVEGUIDES
TIEN, PK
[J]. REVIEWS OF MODERN PHYSICS, 1977, 49 (02) : 361 - 420
[9] MODES OF PROPAGATING LIGHT WAVES IN THIN DEPOSITED SEMICONDUCTOR FILMS
TIEN, PK
ULRICH, R
MARTIN, RJ
[J]. APPLIED PHYSICS LETTERS, 1969, 14 (09) : 291 - &
[10] SILICON-NITRIDE DEPOSITION IN THIN-FILM BY CHEMICAL-REACTION IN LOW-PRESSURE RF DISCHARGE
TURBAN, G
CATHERINE, Y
[J]. THIN SOLID FILMS, 1976, 35 (02) : 179 - 194