DIAMOND MEMBRANE BASED X-RAY MASKS

被引：4

作者：

LOCHEL, B ^{[1
]}

HUBER, HL ^{[1
]}

KLAGES, CP ^{[1
]}

SCHAFER, L ^{[1
]}

BLUHM, A ^{[1
]}

机构：

[1] FRAUNHOFER INST SCHICHT & OBERFLACHENTECHN,W-2000 HAMBURG 54,GERMANY

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1992年 / 10卷 / 06期

关键词：

D O I：

10.1116/1.585916

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Diamond layers are of special interest for x-ray mask fabrication because of their excellent optical and mechanical properties. Using a plasma activated chemical vapor deposition process, 2-5 mum thick diamond layers were deposited and characterized. Microhardness and Young's modulus are found to be very close to the literature values of bulk diamond. A standard isotropic etching process was applied for membrane fabrication. The optical transparency and the thickness homogeneity were measured. Concerning surface roughness, scanning electron micrographs and atomic force measurements were evaluated. After irradiation of diamond masks with synchrotron light, a slight increase of optical transparency was found.

引用

页码：3217 / 3220

页数：4