MATERIALS FOR MULTILAYER ZONE PLATES - DEVELOPMENT OF A FOCUSING ELEMENT FOR USE IN SR PHOTO-EXCITED PROCESSES

被引：12

作者：

TAMURA, S

OHTANI, K

KAMIJO, N

机构：

[1] Osaka National Research Institute, AIST, Ikeda, Osaka, 563

来源：

APPLIED SURFACE SCIENCE | 1994年 / 79-80卷

关键词：

D O I：

10.1016/0169-4332(94)90464-2

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

A synchrotron radiation hard X-ray microbeam (SR) will be a new powerful tool for SR photo-excited material fabrication processes. A multilayer zone plate (ZP) fabricated by a sputtered-sliced technique is expected to be a hopeful optical element to form a hard X-ray microbeam. Four types of concentric multilayers (W/C, Cr/C, Ag/C and Cu/C) were fabricated in order to find usable materials for the multilayer ZP, because the roughness of the multilayer interface reduces the focusing performance of the ZP. The Ag/C multilayer was the most suitable ZP material because of less interface roughness and a smooth surface configuration.

引用

收藏

页码：514 / 518

页数：5

相关论文

共 29 条

[1] X-RAY ZONE PLATES FABRICATED USING ELECTRON-BEAM LITHOGRAPHY AND REACTIVE ION ETCHING [J].

ARITOME, H ;

AOKI, H ;

NAMBA, S .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (01) :265-267

[2]

BIONTA RM, 1989, P SOC PHOTO-OPT INS, V1160, P12

[3] TABLETOP X-RAY MICROSCOPE USING 8 KEV ZONE PLATES [J].

BIONTA, RM ;

ABLES, E ;

CLAMP, O ;

EDWARDS, OD ;

GABRIELE, PC ;

MILLER, K ;

OTT, LL ;

SKULINA, KM ;

TILLEY, R ;

VIADA, T .

OPTICAL ENGINEERING, 1990, 29 (06) :576-580

[4]

BIONTA RM, 1988, P SOC PHOTO-OPT INS, V984, P247

[5] HIGH-RESOLUTION X-RAY MICROSCOPY USING AN UNDULATOR SOURCE, PHOTOELECTRON STUDIES WITH MAXIMUM [J].

CAPASSO, C ;

RAYCHAUDHURI, AK ;

NG, W ;

LIANG, S ;

COLE, RK ;

WALLACE, J ;

CERRINA, F ;

MARGARITONDO, G ;

UNDERWOOD, JH ;

KORTRIGHT, JB ;

PERERA, RCC .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1991, 9 (03) :1248-1253

[6] DESIGN OF A GRADIENT REFRACTIVE-INDEX PHASE ZONE PLATE FOR SOFT X-RAYS [J].

FUJISAKI, H ;

NAKAGIRI, N .

APPLIED OPTICS, 1990, 29 (04) :483-488

[7] DEVELOPMENT OF A SCANNING-X-RAY MICROPROBE WITH SYNCHROTRON RADIATION [J].

HAYAKAWA, S ;

IIDA, A ;

AOKI, S ;

GOHSHI, Y .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1989, 60 (07) :2452-2455

[8] FLUORESCENCE X-RAY ABSORPTION FINE-STRUCTURE MEASUREMENTS USING A SYNCHROTRON RADIATION X-RAY MICROPROBE [J].

HAYAKAWA, S ;

GOHSHI, Y ;

IIDA, A ;

AOKI, S ;

SATO, K .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1991, 62 (11) :2545-2549

[9] SOFT-X-RAY MICROSCOPE AT THE UNDULATOR BEAMLINE OF THE PHOTON FACTORY [J].

KAGOSHIMA, Y ;

AOKI, S ;

KAKUCHI, M ;

SEKIMOTO, M ;

MAEZAWA, H ;

HYODO, K ;

ANDO, M .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1989, 60 (07) :2448-2451

[10]

KOBAYASHI H, 1993, SUPATTAHAKUMAKU