SURFACE-LAYER SWELLING ON IMPLANTATION OF HYDROGEN-IONS INTO SILICON AT DIFFERENT DOPING CONCENTRATIONS

被引：2

作者：

ABROYAN, IA

KRUGLOV, MV

SOLOMIN, IK

机构：

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1987年 / 101卷 / 01期

关键词：

D O I：

10.1002/pssa.2211010132

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：K5 / K8

页数：4

共 11 条

[1] AFANASIEV AM, 1978, ZH EKSP TEOR FIZ+, V74, P300
[2] Burenkov A. F., 1980, TABLES SPATIAL DISTR
[3] FRANK W, 1975, I PHYS C SER, V23, P23
[4] KOVALCHUK MV, 1984, POVERKHNOST, P68
[5] DETECTION OF ATOMIC PLANE DISPLACEMENTS IN NEAR-SURFACE LAYERS OF CRYSTALS USING ANGULAR-DEPENDENCE OF PHOTOEMISSION DURING BRAGG-DIFFRACTION OF X-RAYS
KRUGLOV, MV
SHCHEMELEV, VN
KAREVA, GG
[J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1978, 46 (01): : 343 - 350
[6] DETERMINATION OF THE PHOTOEMISSION GENERATION DEPTH WITH USE OF EXPERIMENTS ON THE DYNAMIC SCATTERING OF X-RAYS
KRUGLOV, MV
SOLOMIN, IK
LUNEV, AV
[J]. PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1986, 133 (01): : 47 - 55
[7] KRUGLOV MV, 1984, APPARATURA METODY RE, V32, P3
[8] INVESTIGATION OF ION-IMPLANTATION DAMAGE WITH X-RAY DOUBLE REFLECTION
LECROSNIER, DP
PELOUS, GP
BURGEAT, J
[J]. APPLIED PHYSICS LETTERS, 1977, 30 (03) : 141 - 143
[9] TAMENDAROV MF, 1983, THESIS ALMA ATA
[10] Thompson M.W., 1974, DEFECTS RAD DAMAGE M