OBSERVATION OF A NEGATIVE ELECTRON-AFFINITY FOR HETEROEPITAXIAL ALN ON ALPHA(6H)-SIC(0001)

被引:184
作者
BENJAMIN, MC [1 ]
WANG, C [1 ]
DAVIS, RF [1 ]
NEMANICH, RJ [1 ]
机构
[1] N CAROLINA STATE UNIV, DEPT MAT SCI & ENGN, RALEIGH, NC 27695 USA
关键词
D O I
10.1063/1.111312
中图分类号
O59 [应用物理学];
学科分类号
摘要
This study demonstrates the presence of a negative electron affinity (NEA) surface on AlN was grown on alpha(6H)-SiC. Heteroepitaxial AlN was grown on alpha(6H)-SiC(0001) substrates by molecular beam epitaxy techniques. The surface electronic states were characterized by ultraviolet photoemission obtained at surface normal. The observation of a sharp spectral feature at the lowest energy of the emitted electrons is an indication of a surface with a negative electron affinity. In addition, the trend of the NEA feature was examined as a function of annealing. The surface Fermi level is found to be near the middle of the AlN gap, and a possible band alignment between the AlN and SiC is presented.
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页码:3288 / 3290
页数:3
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