PHOTOLITHOGRAPHICALLY PATTERNED THIN-FILM MULTILAYER DEVICES OF YBA2CU3O7-X

被引：11

作者：

KINGSTON, JJ ^{[1
]}

WELLSTOOD, FC ^{[1
]}

QUAN, D ^{[1
]}

CLARKE, J ^{[1
]}

机构：

[1] UNIV CALIF BERKELEY LAWRENCE BERKELEY LAB,CTR ADV MAT,DIV MAT SCI,BERKELEY,CA 94720

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1991年 / 27卷 / 02期

关键词：

D O I：

10.1109/20.133342

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We have fabricated thin-film YBa2Cu3O7-x-SrTiO3-YBa2Cu3O7-x multilayer interconnect structures in which each in situ laser-deposited film is independently patterned by photolithography. In particular, we have constructed the two key components necessary for a superconducting multilayer interconnect technology, crossovers and window contacts. As a further demonstration of the technology, we have fabricated a thin-film flux transformer, suitable for use with a Superconducting QUantum Interference Device (SQUID), that includes a ten-turn input coil with 6-mu-m linewidth. Transport measurements showed that the critical temperature was 87K and the critical current was 135-mu-A at 82K.

引用

页码：974 / 977

页数：4

共 12 条

[1] DIGITAL LOGIC-CIRCUITS [J].

HASUO, S ;

IMAMURA, T .

PROCEEDINGS OF THE IEEE, 1989, 77 (08) :1177-1193

[2]

HAUSER B, 1988, APPL PHYS LETT, V52, P844, DOI 10.1063/1.99303

[3] MULTILAYER YBA2CU3OX-SRTIO3-YBA2CU3OX FILMS FOR INSULATING CROSSOVERS [J].

KINGSTON, JJ ;

WELLSTOOD, FC ;

LERCH, P ;

MIKLICH, AH ;

CLARKE, J .

APPLIED PHYSICS LETTERS, 1990, 56 (02) :189-191

[4] QUANTUM INTERFERENCE DEVICES MADE FROM SUPERCONDUCTING OXIDE THIN-FILMS [J].

KOCH, RH ;

UMBACH, CP ;

CLARK, GJ ;

CHAUDHARI, P ;

LAIBOWITZ, RB .

APPLIED PHYSICS LETTERS, 1987, 51 (03) :200-202

[5] LOW-NOISE THIN-FILM TIBACACUO DC SQUIDS OPERATED AT 77-K [J].

KOCH, RH ;

GALLAGHER, WJ ;

BUMBLE, B ;

LEE, WY .

APPLIED PHYSICS LETTERS, 1989, 54 (10) :951-953

[6] DC-SQUID WITH HIGH-CRITICAL-TEMPERATURE OXIDE-SUPERCONDUCTOR FILM [J].

NAKANE, H ;

TARUTANI, Y ;

NISHINO, T ;

YAMADA, H ;

KAWABE, U .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1987, 26 (11) :L1925-L1926

[7] NIOBIUM-BASED INTEGRATED-CIRCUIT TECHNOLOGIES [J].

TARUTANI, Y ;

HIRANO, M ;

KAWABE, U .

PROCEEDINGS OF THE IEEE, 1989, 77 (08) :1164-1176

[8]

TIDJANI ME, UNPUB APPL PHYS LETT

[9] NONAQUEOUS CHEMICAL ETCH FOR YBA2CU3O7-X [J].

VASQUEZ, RP ;

HUNT, BD ;

FOOTE, MC .

APPLIED PHYSICS LETTERS, 1988, 53 (26) :2692-2694

[10] JOSEPHSON MEMORY TECHNOLOGY [J].

WADA, Y .

PROCEEDINGS OF THE IEEE, 1989, 77 (08) :1194-1207

← 1 2 →