INVESTIGATION OF MOLECULAR-BEAM EPITAXIALLY GROWN INAS/(IN,GA)SB STRAINED-LAYER SUPERLATTICES

被引:9
作者
GOLDING, TD
SHIH, HD
ZBOROWSKI, JT
FAN, WC
HORTON, CC
CHOW, PC
VIGLIANTE, A
COVINGTON, BC
CHI, A
ANTHONY, JM
SCHAAKE, HF
机构
[1] SAM HOUSTON STATE UNIV,DEPT PHYS,HUNTSVILLE,TX 77341
[2] UNIV HOUSTON,DEPT PHYS,HOUSTON,TX 77204
[3] TEXAS INSTRUMENTS INC,CENT RES LABS,DALLAS,TX 75265
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1992年 / 10卷 / 02期
关键词
D O I
10.1116/1.586142
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We report on an investigation into the molecular-beam epitaxial growth and characterization of InAs/InxGa1-xSb (0 less-than-or-equal-to x less-than-or-equal-to 0.4) heterojunctions and strained-layer superlattices (SLS) for long-wavelength infrared detector applications. All structures have been grown on GaSb(100) substrates with period thicknesses of the SLS in the range 25-180 angstrom. Interface properties of single heterojunction structures have been characterized by x-ray photoelectron spectroscopy and secondary-ion mass spectroscopy depth profiles, and structural properties of the SLS have been assessed by transmission electron microscopy and x-ray diffraction analysis. For growth at an optimal temperature (390-degrees-C) the SLS are of high structural quality, with no evidence of compound formation at either (GaSb/InAs, InAs/GaSb) interface, or of post-growth interdiffusion. However, significant levels of As (7%) are found to be present in nominally grown InxGa1-xSb layers, resulting from incorporation from background. Fourier transform infrared absorption spectra of SLS samples have shown absorption thresholds out of 19-mu-m.
引用
收藏
页码:880 / 884
页数:5
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