ATOM-PROBE FIELD-ION MICROSCOPY OF A HIGH-INTENSITY GALLIUM ION-SOURCE

被引:33
作者
CULBERTSON, RJ [1 ]
ROBERTSON, GH [1 ]
KUK, Y [1 ]
SAKURAI, T [1 ]
机构
[1] PENN STATE UNIV,MAT RES LAB,UNIVERSITY PK,PA 16802
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1980年 / 17卷 / 01期
关键词
D O I
10.1116/1.570433
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:203 / 206
页数:4
相关论文
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