RESIDUAL-STRESSES IN POLYMERIC PASSIVATION AND ENCAPSULATION MATERIALS

被引:8
作者
NOYAN, IC
NGUYEN, LT
机构
[1] IBM, United States
关键词
D O I
10.1002/pen.760281603
中图分类号
TQ [化学工业];
学科分类号
0817 ;
摘要
23
引用
收藏
页码:1026 / 1033
页数:8
相关论文
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