MOISTURE DIFFUSION IN POLYIMIDE FILMS IN INTEGRATED-CIRCUITS

被引：118

作者：

DENTON, DD

DAY, DR

PRIORE, DF

SENTURIA, SD

ANOLICK, ES

SCHEIDER, D

机构：

[1] MIT,CTR MAT SCI & ENGN,CAMBRIDGE,MA 02139

[2] IBM CORP,PROD ASSURANCE,FISHKILL,NY 12524

来源：

关键词：

D O I：

10.1007/BF02656671

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：119 / 136

页数：18

共 12 条

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[8] SHAH P, 1979, IEEE P IEDM, P465
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