A NUCLEAR-MAGNETIC-RESONANCE STUDY OF PHOSPHORUS-DOPED POLYCRYSTALLINE SILICON

被引：3

作者：

MCCARTHY, MJ ^{[1
]}

MEYERSON, BS ^{[1
]}

REIMER, JA ^{[1
]}

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 62卷 / 09期

关键词：

D O I：

10.1063/1.339826

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3665 / 3670

页数：6

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