STUDY OF INSULATOR MATERIALS USED IN ISFET GATES

被引：26

作者：

COHEN, RM

HUBER, RJ

JANATA, J

URE, RW

MOSS, SD

机构：

来源：

THIN SOLID FILMS | 1978年 / 53卷 / 02期

关键词：

D O I：

10.1016/0040-6090(78)90031-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：169 / 173

页数：5

相关论文

共 14 条

[1] DEVELOPMENT, OPERATION, AND APPLICATION OF ION-SENSITIVE FIELD-EFFECT TRANSISTOR AS A TOOL FOR ELECTROPHYSIOLOGY
BERGVELD, P
[J]. IEEE TRANSACTIONS ON BIOMEDICAL ENGINEERING, 1972, BM19 (05) : 342 - &
[2] IONIC TRANSPORT IN AMORPHOUS OXIDES
DOREMUS, RH
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1968, 115 (02) : 181 - &
[3] Grove A S, 1967, PHYS TECHNOLOGY SEMI
[4] WATER CONTAMINATION IN THERMAL OXIDE ON SILICON
HOLMBERG, GL
KUPER, AB
MIRALDI, FD
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1970, 117 (05) : 677 - +
[5] JANATA J, 1976, BIOMED ENG, V11, P241
[6] LOEB LB, 1941, PHYS REV, V60, P715
[7] BEHAVIOR OF VARIOUS INSULATING FILMS IN HIGH-TEMPERATURE WATER AND MOISTURE
MAEDA, K
SATO, J
BAN, Y
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1977, 16 (05) : 729 - 736
[8] INTEGRATED FIELD-EFFECT ELECTRODE FOR BIOPOTENTIAL RECORDING
MATSUO, T
WISE, KD
[J]. IEEE TRANSACTIONS ON BIOMEDICAL ENGINEERING, 1974, BM21 (06) : 485 - 487
[9] ANODIC OXIDATION OF SILICON - EFFECTS OF WATER ON OXIDE PROPERTIES
NANNONI, R
MUSSELIN, MJ
[J]. THIN SOLID FILMS, 1970, 6 (06) : 397 - &
[10] OXIDE-SOLUTION INTERFACE
PERRAM, JW
HUNTER, RJ
WRIGHT, HJL
[J]. AUSTRALIAN JOURNAL OF CHEMISTRY, 1974, 27 (03) : 461 - 475