INSITU RESISTANCE MEASUREMENTS DURING ION-INDUCED PT/AL AMORPHOUS PHASE FORMATION

被引：3

作者：

ALFORD, TL

BLANPAIN, B

ALLEN, LH

MAYER, JW

机构：

[1] Department of Materials Science and Engineering, Cornell University, Ithaca

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1991年 / 59卷

关键词：

D O I：

10.1016/0168-583X(91)95246-A

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Ion-induced amorphization of Pt/Al multilayers has been investigated by in-situ resistance measurements and has been correlated with transmission electron microscopy and X-ray diffraction results. The resistance measurements distinguished an initial stage of rapid increase due the formation of an amorphous Al/Pt layer. This layer was believed to have a composition in the range of thermally induced amorphization. The slower final stage of resistance change was attributed to the formation of an amorphous layer with a compositional range extended beyond that found for thermal reactions.

引用

页码：401 / 405

页数：5

共 12 条

[1] FUNDAMENTAL-ASPECTS OF ION-BEAM MIXING [J].