ION MIXING KINETICS STUDY BY INSITU RESISTANCE MEASUREMENTS IN THE AU/SI SYSTEM

被引：6

作者：

LI, J

ALLEN, LH

MAYER, JW

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 36卷 / 02期

关键词：

D O I：

10.1016/0168-583X(89)90577-6

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：153 / 156

页数：4

共 7 条

[1]

ATWATER HA, 1986, BEAM SOLID INTERACTI, V51, P337

[2] OXIDATION BEHAVIOR OF AU-SI FILMS [J].

HEWETT, CA ;

LAU, SS .

APPLIED PHYSICS LETTERS, 1987, 50 (13) :827-829

[3]

Mayer J. W., 1984, GOLD BULL, V17, P18

[4] PHASE-TRANSFORMATIONS IN ALLOY AND BILAYER THIN-FILMS OF VANADIUM AND SILICON [J].

NAVA, F ;

PSARAS, PA ;

TAKAI, H ;

TU, KN .

JOURNAL OF APPLIED PHYSICS, 1986, 59 (07) :2429-2438

[5] INSITU RESISTIVITY MEASUREMENT OF COBALT SILICIDE FORMATION [J].

OTTAVIANI, G ;

TU, KN ;

PSARAS, P ;

NOBILI, C .

JOURNAL OF APPLIED PHYSICS, 1987, 62 (06) :2290-2294

[6] ION-BEAM MIXING KINETICS OF FE-AL MULTILAYERS STUDIED BY INSITU ELECTRICAL-RESISTIVITY MEASUREMENTS [J].

RIVIERE, JP ;

DELAFOND, J ;

JAOUEN, C ;

BELLARA, A ;

DINHUT, JF .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1984, 33 (02) :77-82

[7] METASTABLE AU-SI ALLOY FORMATION INDUCED BY ION-BEAM INTERFACE MIXING [J].

TSAUR, BY ;

MAYER, JW .

PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1981, 43 (02) :345-361

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