A SIMPLE AND SENSITIVE WAY TO DETERMINE CARBON-FILM THICKNESS

A sensitive, non-destructive and fast technique for the determination of the thickness of thin diamond or diamond-like carbon films has been studied. The method is based on the emission of characteristic X-rays from the substrate of the film. A scanning electron microscope equipped with an X-my detector is used. The technique is calibrated for determination of the thickness of crystalline and amorphous carbon films supported by silicon. Using a steel substrate as an example, the method is argued to be calibrated for almost any practical substrate. The technique is very sensitive and may also be applied as a tool for thickness contour determination for thin film materials.