MASS SPECTROMETRY OF BACKGROUND GASES IN GLOW-DISCHARGE SPUTTERING OF TANTALUM THIN FILMS

被引：27

作者：

SOSNIAK, J

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来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1967年 / 4卷 / 02期

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D O I：

10.1116/1.1492527

中图分类号：

O59 [应用物理学];

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页码：87 / &

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